Korvus Technology designs and manufactures the HEX Series of modular thin film deposition systems for substrates in the range of 100mm up to 200mm diameter. The most flexible platforms named HEX, HEX-L and HEX-XL offer an un-matched level of user control and enables fit-to-purpose configurations: sputtering (RF, DC, HiPIMS), e-beam, OLED, thermal evaporation or any combination of these processes. The HEX can be setup as bench top PVD system. The larger HEX-L and HEX-XL always have their own stands. Integration to a glovebox - even as retrofit - is easily achieved with its unique and space-saving approach.
Each of the six side panels are removable and can be equipped with any of the Korvus deposition sources enabling co-deposition, multi-layer and even multi-process deposition without breaking vacuum. The HEX series is used within universities and laboratories worldwide for applications including research into new materials, sputter deposition, contact metallisation, coating of electrical contacts, lift off, EM sample preparation and even teaching. The HEX’s modularity and ease of use make it the ideal tool for any laboratory, any clean room and perfect for thin film training programs.
The range of vacuum deposition systems from Moorfield Nanotechnology aim at research institutions as well as pilot-scale industrial production and high-end educational institutions. System designs involve extensive modularity, leading to tailored solutions ideal for R&D environments where varying technical challenges are common.
The system range featuring starter platforms and bench top systems known as the nano-series and modular often be-spoke minilab-systems which can then be populated with numerous components for deposition of metals, inorganics and organics. Systems can be built as standalone units, or can be combined with gloveboxes when air sensitivity is an issue.
Moorfield Nanotechnology has also developed CVD systems that allow for easy production of the so-called ‘wonder materials’ graphene and carbon nanotubes (CNTs). These systems are capable of scalable, cost-efficient synthesis of high-quality material for future commercialisation of carbon nanomaterials.
